1.
Itagaki N, Oshikawa K, Matsushima K, Suhariadi I, Yamashita D, Seo H, et al. Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate. PSE [Internet]. 2013 Mar. 4 [cited 2025 Jul. 8];2(13):84-7. Available from: https://www.wcc.ep.liu.se/index.php/PSE/article/view/398