Development and Application of New Multicomponent Electrode Materials for Deposition Technologies

Författare

  • Evgeny Levashov National University of Science and Technology "MISIS", Russia
  • Yuri Pogozhev National University of Science and Technology "MISIS", Russia
  • Dmitry Shtansky National University of Science and Technology "MISIS", Russia
  • Alexander Kudryashov National University of Science and Technology "MISIS", Russia
  • Philipp Kiryukhantsev-Korneev National University of Science and Technology "MISIS", Russia

DOI:

https://doi.org/10.3384/wcc2.10-13

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Publicerad

2013-03-04

Referera så här

1.
Levashov E, Pogozhev Y, Shtansky D, Kudryashov A, Kiryukhantsev-Korneev P. Development and Application of New Multicomponent Electrode Materials for Deposition Technologies. PSE [Internet]. 04 mars 2013 [citerad 09 december 2025];2(13):10-3. Tillgänglig vid: https://www.wcc.ep.liu.se/index.php/PSE/article/view/379

Nummer

Vol 2 Nr 13 (2012): 13th International Conference on Plasma Surface Engineering September 10 - 14, 2012, in Garmisch-Partenkirchen, Germany

Sektion

Session 4 - Physical Vapour Deposition I